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Micromechatronics: Micro Electro Mechanical Systems

MICROMECHATRONICS : Micro Electro Mechanical Systems – discusses MEMS as M.E. degree level subject. The book introduces the most accepted MEMS concepts such as design, fabrication and devices. The book is divided into 3 chapters and is intended mainly to serve as a textbook for ME (Mechatronics Engineering) and as reference book for BE (Mechanical, Automobile & Aeronautical). Again to say, It is m...

Paperback: 302 pages
Publisher: CreateSpace Independent Publishing Platform (October 11, 2016)
Language: English
ISBN-10: 1539464636
ISBN-13: 978-1539464631
Product Dimensions: 6 x 0.7 x 9 inches
Format: PDF Text TXT ebook

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hope that book will become an invaluable source of essential information for academicians, industrialists and governmental researchers working in MEMS.