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High Resolution Focused Ion Beams: Fib And Its Applications: The Physics Of Liquid Metal Ion Sources And Ion Optics And Their Application To Focused Ion Beam Technology
In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us.The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of th...
Hardcover: 304 pages
Publisher: Springer; 2003 edition (October 31, 2002)
Product Dimensions: 6.1 x 0.8 x 9.2 inches
Amazon Rank: 4985988
Format: PDF ePub djvu ebook
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“First, I must say that I am reviewing this book from a side of scientist who wanted to learn mostly on applications and on related physics necessary to understand a topic of application itself.Minuses of the book:-Book is not thorough on application....”
liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.